The JSM-7000F is a field-emission scanning electron microscope with a Schottky type field-emission gun for the electron source. The instrument is equipped for energy dispersive X-ray spectroscopy (EDS).

  • Schottky Field Emission Cathode
  • High Resolution (1.2nm @30kV)
  • Secondary (SEI) and Backscatter (BSE-TOPO/COMPO) Imaging





Before you start: Status Check

Nitrogen Bottle Pressure

Check the nitrogen bottle pressure on the regulator (gauge closest to the bottle valve) must be above 2000kPa. Do not adjust the regulator or close the bottle.

Remember the bottle pressure for adding to the instrument log when you get to that point.

Nitrogen Regulator


Stage Configuration Check

Use the IR-camera to confirm that:

  1. removable detectors are retracted
  2. there is no sample holder on the stage
  3. the stage is approximately in the correct exchange position


Infrared camera view showing empty stage, no holder, and in approximate exchange position

Infrared camera view showing empty stage, no holder, and in approximate exchange position


Select the "Display Camera Input" option from the software toolbar

Turn on the power to the camera


Robinson Backscatter detector inserted


Cathodoluminescence detector inserted

Detectors removed


Vacuum status and stage position check

Verify the exchange chamber buttons EVAC and EXCH POSN are lit and and the HLDR is not lit

Verify the exchange chamber buttons EVAC and EXCH POSN are lit and and the HLDR is not lit


  1. Add a comment to the user log that the stage was not returned to the exchange position after the last use. 
  2. Confirm it is the only incorrect configuration of the instrument, check with the infra-red camera that there is no holder inserted onto the stage
  3. From the specimen exchange menu, select exchange and wait for the EXCH POSN light
  4. Continue
  1. Confirm with the infra-red camera if there is a holder inserted onto the stage
  2. Do not proceed. Notify staff immediately
  1. Add a comment to the user log that the exchange chamber was not evacuated after the last use. 
  2. Confirm it is the only incorrect configuration of the instrument
  3. Continue


Select a specimen holder


Use gloves to handle any items that are to be used in vacuum. Grease from hands is a major source of contamination under high vacuum.

The holders are shown below:

12.5mm

32mm

3WH

2BH

SM71270


Measure to the nearest millimetre the distance from the top of the sample holder to the top of the tallest sample on the holder. You will enter this value into the software as the sample offset. It is better to be conservative if an accurate measurement cannot be easily acquired

Enter the holder type and sample height into the SEM software





Inserting the specimen into the exchange chamber


  1. Flip the cover on the VENT button. Press and hold the VENT button for 3 seconds until the light begins to flash

  2. Unclip the latch on the door
  3. Wait until the VENT light stops flashing
  4. The exchange door can be opened
  5. Insert the specimen holder into the spring loaded exchange carrier
    1. Place the holder onto the region in front of the spring arms.
    2. The dovetail on the holder should be parallel to the transfer direction

    3. slide the holder back against the spring arms until it is fully seated

  6. Close and latch the chamber door

  7. Press and hold EVAC for 3 seconds until the light begins flashing
  8. Wait for the EVAC light to turn solid





Exchange the holder to the main vacuum chamber


Only hold the rod by the black handle. The rod itself is coated in grease to form a seal during the transfer operation


Lay the rod down horizontally, when the end drops off the hinge it will spring forward. Hold the handle to control the spring.

Tap the end of the handle to ensure correct compression of the carrier seal

Push the rod until it is fully inserted. There will be slight resitance towards the end as the stage carrier springs are extended

Wait for 3 seconds until the HLDR light is lit

Fully retract the exchange rod. Continue pulling the rod horizontally until the end reaches the arrows on the hinge bracket

The Penning vacuum gauge on the software should return to non-zero value after a few seconds if the vacuum hasn't been interrupted during the transfer

Sample exchange is complete

Instrument setup for use

Select the holder type from the Stage specimen Holder exchange

Enter the "specimen surface offset" in the lower half of the form. You have to press enter after entering the value otherwise it won't be modified.

Ensure the IR-camera  is powered on and the signal is displayed on the SEM software


Enter details into the usage log